Journal for Biophysical Chemistry
Table 3 Heights of the micropillars (95% confidence intervals, CI) measured using VEECO Wyko NT9300 optical surface profiler, and comparisons with the simulated values
Etching time | 14 | 18 | 22 | 26 | 30 |
|---|---|---|---|---|---|
95% CI (μm) | 14.6 ± 2.7 | 16.3 ± 2.8 | 15.2 ± 3.5 | 12.5 ± 2.7 | 16.9 ± 5.5 |
Simulated value (μm) | 15.4 | 15.4 | 15.4 | 15.4 | 15.4 |