Journal for Biophysical Chemistry
From: Evaluation of Protein Adsorption on Atmospheric Plasma Deposited Coatings Exhibiting Superhydrophilic to Superhydrophobic Properties
Monomer
Monomer flow rate (μl/min)
Process gas
Substrate to source distance (mm)
He (l/min)
N2 (ml/min)
O2 (ml/min)
TEOS
5
0
50
6
HMDSO
4
TCFS
HMDSO*
3
70
TCFS*