Fig. 1
From: Three-Dimensional Carbon Nanotube Electrodes for Extracellular Recording of Cardiac Myocytes
Schematic representation of chip manufacturing. a Photoresist is spin coated onto substrate and photolithographically patterned. b Cr/Au electrodes and connecting lines are structured by a lift-off process. c SiO2 is sputtered onto the electrodes. d Second resist mask is structured and e the isolation layer is opened for electrodes and bond pads. f Carbon nanotubes are synthesized by a chemical vapour deposition process [19]